Waferprober

Task

Design and redevelopment of control software for a dated wafer prober (Karl Suss). Implementation of additional customer-specific control and measurement capabilities.

Requirements

  • Inventory of measurement devices, mechanics, and electronics
  • Evaluation and verification of the communication protocol between PC and each axis controller
  • Software operation by semiskilled personnel, no special knowledge required
  • All panels, dialogs and the whole documentation in english
  • Definition of measurement and way point positions on chip and wafer level
  • Bundling several chips to one wafer without touching the previously taught positions
  • Automatic or semi-automatic test run using the previously taught positions
  • Manual operation
  • Advanced tools for chip and wafer placement
LabWindows/CVI Application

Solution

Software development and programming in LabWindows/CVI (National Instruments). Measurement data acquisition with Micro Ohmmeter 580 and Switch System 7001 (both Keithley Instruments), controlled via GPIB. Axis controller communication via RS485.